Particle Size Distribution Shift as a Predictor of Slurry Stability

Fujimi Corporation’s Jimmy Granstrom and Hisashi Takeda, in collabratin with Fujimi Incorporated’s Shogo Oonishi and Masaki Tada, presented a paper at this year’s ICPT conference. The research paper, titled “Particle Size Distribution Shift as a Predictor of Slurry Stability” was presented by Jimmy Granstrom of Fujimi Corporation. The International Conference on Planarization/CMP Technology (ICPT) was held September 30th ~ October 2nd, 2015 in Chandler, Arizona.