PLANERLITE 5000 SERIES – W CMP Slurry

Fujimi’s PLANERLITE 5000 series of CMP polishing slurries are applied exclusively to metal wiring or plugs used for the circuits of VLSI (Very-Large-Scale Integration) devices.

Category CMP (Chemical Mechanical Planarization)

ApplicationVlsi Device Polishing

TypeSlurry

Material Colloidal Silica

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Fujimi’s global network is designed to meet the demands of our customers and provide the highest quality of materials and support available. Our network consists of Fujimi Incorporated, located in Japan, and its four subsidiaries strategically located around the globe.

PLANERLITE 5000 SERIES – W CMP Slurry

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